Tool Automation & Vacuum Robots

Sankyo's product lineup covers different kind of vacuum handling robots as well as complete vacuum transfer chambers for cluster applications. On request, customized versions are available.

All vacuum robots are controlled by the same type of robot controller (SC5xxx).

  • Common Features of Sankyo's vacuum handling systems:

  • Large Reach and at the same time compact Design
  • AC Servo Motors with Absolute Encoders
  • High resolution absolute encoders - eliminates need for homing!
  • Excellent Straight Line Accuracy
  • Uses SC5xxx Series Controller



LCD Handling

Sankyo is a pioneer in the development of LCD handling robots and is regarded as an expert in this field with its exceptional atmospheric and vacuum clean room robot technology.

Today, Sankyo is a world leader in LCD handling, especially large size substrate handling, and the product lineup covers different kind of robots for atmospheric and vacuum environments as well as complete handling solutions with cassette stations, Host Interfaces, etc.