Auto Teaching - Simplify Tool Setup and Reduce Down Time



At a Glance


  • Suitable for any robot system handling round or square substrates (wafer, reticles, LCD or Solar panels, etc.)

  • Based on a sensor carrier, shaped as the substrate, with wireless connection to the robot controller

  • Complete automatic re-teaching at any time: only during first tool set-up the sensor carrier has to be placed once manually on the robot end effector

  • Customized sensor carriers available if needed in order to meet unique tool requirements

  • Patent pending: PCT/EP2010/002213



Detailed course of events using the example of 300mm wafers

  1. From the tool CAD data a generic teach data file is created.
  2. At the first tool set-up, operator places the sensor carrier manually on the robot end effector and starts the auto teaching procedure
  3. Robot moves the sensor carrier to a dedicated position and verifies the position of the sensor carrier on the end effector; for this process, sensors mounted on the carrier are used; the sensor signals are transferred wireless to the robot controller and interpreted by a robot macro
  4. Once the position of the sensor carrier on the end effector is verified, the robot moves the carrier to each pick/place position and verifies the difference between generic positions (CAD) with actual positions; actual pick/place positions are calculated by the robot macro and saved in the teach data file
  5. Once the auto teach process for all positions is finished, the sensor carrier can be either kept in the tool or removed by using a FOUP to be used for other tools
  6. Re-Teaching: robot takes the sensor carrier out of the FOUP
  7. Steps 3 through 6 are repeated until teaching is complete.

 

 

Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.