LCD Robot Systems for Atmospheric and Vacuum Environments

State of the art Control Technology, such as Brushless Servo Motors, Absolute Encoders, “Modern Control Theory”, etc. is used for Sankyo’s Handling Systems. Due to these technologies, reliable and accurate handling at high speed is achieved for substrate sizes up to the latest generation.

Common Features of LCD-Handling robots

• Smooth and quick motion
• High Throughput achieved by improved axes speed and newly developed software
• Low power consumption with rationalized mechanism
• Design concepts considering high rigidity and high reliability
• Applicable for wide range of substrate sizes
• Uses SC3xxx Robot Controller
• Variety of kinematic types:
  • SCARA Systems
  • Cylindrical Systems
  • Track-Mounted Systems

On request, customized versions are available.