LCD Handling Robots for up to 10th Generation Substrates

Sankyo’s latest LCD Handling robots are highly successful in the LCD industry. Many LCD fabs up to 10th generation glass substrate have adopted these robots with great success and satisfaction.

Telescopic Z-Axis Type Robots

• Three-Step Telescopic Axis for up to 1750mm Z-Stroke
• Single and Dual Arm Versions up to 70kg payload
• Track Axis Option with up to 12300mm stroke
• Substrate Alignment Sensors

Long Stroke Z-Axis Type Robots

• Double and Triple Slide Z-Axis allows Z-Strokes up to 5meter at a minimum turning radius
• Special Versions with more than 5meter Z-Stroke
• Single and Dual Arm Versions up to 100kg payload
• Track Axis Option with up to 12300mm stroke
• Substrate Alignment Sensors
• Auto Teaching Function
• Offline Simulator