LCD Handling Robots for small to medium sized substrates

SCARA Types (Extract)

SR8140 (Double Arm Robot) /

SR8150 (Single Arm Robot)

• Class 10 (0.3 μm particle size)
• 1375 mm long stroke (R axis) for LCD substrates
• (700x900 mm² and more)
• 750 mm Z axis stroke; achieving longer Z axis by 200 mm with keeping 1050 mm pass line (compared to our conventional model)
• Improving the through-put due to the quick access to the process machine by dual arm (RR axis and RL axis).
• Achieving the high performance of cleanliness because of no mechanical source of particle generation on the above pass line by the SCARA type robot structure.
• Impressive smooth straight motion by the stiff arm structure and transmission improvement.
• High reliability and improved maintenance efficiency.
• All axes are AC servo motor controlled.
• No homing sequence required due to built-in absolute encoder.
• Uses SC3150 Series Controller.
• Track mounted version available

Track-mounted LCD Handling Robots

• High Speed (1,000 mm/s) Track Axis. Belt-drive mechanism providing smooth and quiet operation.
• High reliability.
• Wide range of strokes available
• Sankyo´s original clean technology makes local exhaust unnecessary.
• Uses SC3xxx Controller.

Cylindrical Coordinate Robots

SR8101

• 3-axis Cylindrical Coordinate Type.
• Superior straight line motion.
• Wide range of arm strokes available for up to 1,100 mm reach.
• Variety of vacuum hands with floating pads available.

SR8105

• 3-axis Cylindrical coordinate robot
• Handles substrates up to 700 x 900 mm²
• Variety of Axes stroke
• Excellent for use in stockers of large-sized substrates and loaders/un-loaders for ovens.
• A built-in HEPA unit with an original fan eliminates the need for local exhaust from outside.
• Accessible for a wide range from lowest level.

SR8112

• 4-axis Cylindrical Coordinate Type
• Superior Straight line motion.
• Wide range of stroke available for up to 1,300 mm reach.
• A double handed type with high throughput mainly used in loader/unloaders of inspection machines.
• Ready to design and manufacture vacuum hands with floating features.

• Traveling axis with a stroke between 700 and 5000 mm² (rack and pinion mechanism).
• Designed and manufactured to suit all kinds of glass substrates.
• Non contact alignment.
• Capable to detect positioning errors of glass substrates.