Wafer Pre-Aligners

Sankyo offers wafer edge grip and vacuum type pre-aligners for atmospheric environments.

Common features are:

• For 200mm and 300mm wafers available
• Controlled by SC5000 Robot Controller
• Superior Cleanliness (ISO Class 2)
• Compact and Light Weight

Edge grip type

• 200mm and 300mm version available

Vacuum type

• Can handle 200mm and 300mm wafers at
  the same time