Wafer Cassettes handling robots

Sankyo’s Cassettes Handling Robots are typically used for wafer stocker systems and wafer cassette transport.
Common Features are:

• Class 10 (0.3 µm particle size) / Class 1 on request
• All axes are AC servo motor controlled.
• No homing sequence required due to built-in absolute encoders.
• Variety of End-Effector types