Wafer Handling Systems

State of the art Control Technology, such as Brushless Servo Motors, Absolute Encoders, “Modern Control Theory”, etc. is used for Sankyo’s Handling Systems. Due to these technologies, reliable and accurate handling at high speed is achieved.

All robots are controlled by the same type of robot controller (SC5000) and integrated to an universal Host Interface.

 

Please select the basic system suitable for your application

2 FOUPs in line
3 FOUPs in line 4 FOUPs in lineTrack solution

up to

300mm

wafers &

reticles

82308240 8241 8230 on track
8220

8220 on track

450mm

wafers

8260
 
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