Wafer Handling SystemsState of the art Control Technology, such as Brushless Servo Motors, Absolute Encoders, “Modern Control Theory”, etc. is used for Sankyo’s Handling Systems. Due to these technologies, reliable and accurate handling at high speed is achieved.
All robots are controlled by the same type of robot controller (SC5000) and integrated to an universal Host Interface. |
Please select the basic system suitable for your application
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