Semiconductor Handling Solutions

With decades of experience in Robotics and Clean Room Automation, we are able to provide Equipment Manufacturers and OEMs with a range of fully optimized / customized Wafer Handling Solutions based on a wide variety of key components such as

  • Atmospheric and Vacuum Robots
  • Vacuum Cluster Tools
  • Equipment Front End Modules / Mini-Environments

EFEMs


Cluster Tool / Entire Handling Platform

 
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