200mm Open Cassette Adapter

Handling 200mm Open Cassette at 300mm wafer Loadport

  •  Allows an easy switch-over between 200mm Open Cassette and 300mm FOUP without any modifications

  • Automatic Mapping for either wafer size

  • Prevention Mechanism for Wafer Protrusion:

  • Vertical wafer placement by operator

  • Stabilizing stage rotation with damper function
  • Prevention Mechanism for Incorrect Pick Up:

  • FOUP Clump structure (SEMI Standard) clumps open cassette during “Adaptor Stage Close” motion



Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.