2-Link Atmospheric Robotics

SR8220 / SR8230 Wafer Handler Series


One of the World's Fastest 300 mm Wafer Handling Robot Series. Ultra clean Edge Grip End Effector achieves Superior Fast and Reliable Wafer Handling.


Lightning Fast with Maximum Throughput

  • Precision High Speed Motion
  • Excellent Straight Line Accuracy
  • 50,000 Hours MTBF
  • Super High Rigidity
  • AC Servo Motors with Absolute Encoders
  • Mechanical Edge Grip or Vacuum End Effectors
  • Class 1 Cleanliness
  • Uses SC5000 Series Controller

Variety of versions:

  • Single Arm (SR8230) and
    Dual Arm (SR8220) Versions
  • Track mounted versions
  • Options: Flip Axis, Long Z-Axis,
    Mapping Sensors, etc.
  • Customized Versions




SR8220 Flip Axis


SR8220 Dual Arm




SR8220 on Track Axis



Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.