300mm Load Port Solutions

SELOP-7 applicable to all fabs worldwide

  • User Friendly and Functional

  • Large and easily viewable indicators with selectable
    fab-specific configurations

  • Compliant

  • Compliance with SEMI, CE and fab requirements (S2, S8, E1.9, E15.1, E47.1, E57, E62, E63, E64, E84, E110)

  • Superior Cleanlines

  • Original design prevents particles from penetrating the FOUP

  • Reliable

  • Working in most of 300mm fabs all over the world with abundant supply reference

  • Fast and easy to integrate and maintain

  • Highly accurate mapping technology (Wafer Presence, Double, Cross-slot)

  • Installation:
    Self-standing caster as a standard
    BOLTS surface position adjustment mechanism
    Undock position adjustment function (for OHT)

  • Maintenance:
    Front access to all moving axes
    All resin surface finishing making it free from stain or scratch
    Communication log function and PC maintenance tool



Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.