3-Link Atmospheric Robotics

SR824x Wafer Handler Series: 2,3, and 4 FOUPs Access

Unique 3-Link Robot Design enables access to 4 FOUPs without using linear track axis

Your Benefits:

  • Small Installation Space - Wide Working Area
  • High Speed - Maximum Throughput:
    • Single Arm / Double Hand Type for Cycle Time Reduction
  • Universal Hand Adapter - Easy Exchange / Use of:
    • 200 / 300mm Edge-Grip End Effectors
    • 200 / 300mm Vacuum End Effectors
    • any End Effector combination
  • Optional Flip-Axis (Supinator) on upper hand can reach any position between -10 and 280 degrees

SR8240 SR8241

Small Installation Space - Wide Working Area:   Ability to serve up to 3 FOUPs without linear track axis



Small Installation Space - Wide Working Area:
Ability to serve up to 4 FOUPs without linear track axis



SR824X with flip axis option SR8242

Optional Flip-Axis (Supinator) on upper hand acn reach any position between -10 and 280 degrees



824x

Maximum Throughput: Multi Blade End Effector for Upper Hand - Up to 5 Wafers can be handled at the same time

Maximum Flexibility: Independent working Lower Hand allows flexible Single Wafer Handling

Edge-Grip and Vacuum End Effector versions available


8242

 

 

Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.