Equipment Front End Module Solutions


300mm SINFONIA EFEMs at a Glance


  • Wide variety of versions:

  • 2, 3, 4 and 5 Loadport versions
  • 3-Link robot without track axis for 2 to 4 Loadport versions: Single arm/double end-effector (vacuum or edge grip) for cycle time reduction
  • Dual Arm Robot on track axis for 3 to 5 Loadport versions
  • Superior Cleanliness (ISO Class 1)

  • Optional advanced air filter for 22nm and beyond
  • High Reliability with hith throughput at the same time

  • Excellent Accuracy:

  • Robot / Pre-Aligner: +/-0.05mm

  • Wide variety of options:

  • 300mm, 200mm and bridge tool (200mm / 300mm) functionality

  • Carrier (RFID) reader
  • Wafer ID Reader
  • Pre-Aligner
  • Human Machine Interface
  • Ionizer
  • EFEM Controller
  • EFEM Controller

  • Single access point for controlling all EFEM devices

  • SECS / GEM / HSMS protocol supported



3-Link Robot for 2,3 and 4 Loadports Double Arm Robot on Track Axis

 

 

Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.