Wafer Cassette Handling Robots

Sankyo's Cassettes Handling Robots are typically used for wafer stocker systems and wafer cassette transport.

Common Features are:

  • Class 10 (0.3 µm particle size) / Class 1 on request
  • All axes are AC servo motor controlled.
  • No homing sequence required due to built-in absolute encoders.
  • Variety of End-Effector types




Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.