Edge Grip Prealigner

  • Superior Cleanliness (ISO Class 2)
  • Compact and Lightweight
  • Controlled by SC5000 Robot Controller
    (Robot and Prealigner share the same controller)

Model 300
Wafer Size 300mm
Servo Control Axis Theta a-Axis (8.38rad/sec)
Alignment Accuracy  
      Orientation +/- 0.05deg
      X/Y +/- 0.1mm
Alignment Time < 7sec
Edge-Grip Mechanism Pneumatic
Wafer Contact Material PBI
Orientation Change of Wafer Grip Position Combined Motion of Lift-Pins and Theta-Axis
Wafer Edge Sensor Through Beam Sensor
Weight 15kg



Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.