Tool Automation & Vacuum Robots

Sankyo's product lineup covers different kind of vacuum handling robots as well as complete vacuum transfer chambers for cluster applications. On request, customized versions are available.

All vacuum robots are controlled by the same type of robot controller (SC5000) and integrated to an universal Host Interface.

Common Features of Sankyo's vacuum handling systems:
  • Large Reach and at the same time compact Design
  • AC Servo Motors with Absolute Encoders
  • High resolution absolute encoders - eliminates need for homing!
  • Excellent Straight Line Accuracy
  • Uses SC5000 Series Controller
  • End-Effectors for Wafers and Reticles

Variety of cinematic types:
  • Single and Dual Arm
  • Cylindrical Types with several Arm Lengths
  • XY Arm Version for max. Handling Flexibility
  • Dual Arm Version and Double Plate End-Effector insure max. Throughput

 


 


 

 

Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.