Handling 200mm Open Cassette with 300mm wafer Loadport

• Allows an easy switch-over between 200mm Open Cassette and 300mm FOUP without any modifications
• Automatic Mapping for either wafer size
• Prevention Mechanism for Wafer Protrusion:
• Vertical wafer placement by operator
• Stabilizing stage rotation with damper function
• Prevention Mechanism for Incorrect Pick Up:
• FOUP Clump structure (SEMI Standard) clumps open cassette during “Adaptor Stage Close” motion
• Applicable for SELOP-7 Load Ports