200mm Load Port Solutions

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Available Load Ports:

200/300mm AutoSwitch Load Port

Common Model Robot
Common Model Robot

Handling 200mm Open Cassette with 300mm wafer Loadport

  • Allows an easy switch-over between 200mm Open Cassette and 300mm FOUP without any modifications
  • Automatic Mapping for either wafer size
  • Prevention Mechanism for Wafer Protrusion:
    • Vertical wafer placement by operator
    • Stabilizing stage rotation with damper function
  • Prevention Mechanism for Incorrect Pick Up:
    • FOUP Clump structure (SEMI Standard) clumps open cassette during “Adaptor Stage Close” motion
  • Applicable for SELOP-7 Load Ports