SELOP-8 Features

• Extremely Smooth Motion due to Hybrid (Electric/Pneumatic) FOUP door Open/Close Mechanism
• Reduced vibrations
• Great improvement of particle performance
• Compliance to high sealed FOUPs
• Speed/Throughput improvement
• N2 Bottom Purge Field Upgrade Option
• N2 purging on carrier base: Applicable for ENTEGRIS A-300 and SPECTRA FOUPs
• Superior stable N2 Purge by original movable nozzles (Patent pending)
• Compliance to high sealed FOUPs
• Control of nozzle up/down timing to avoid interference with Kinematic Pins during FOUP placement and to keep compatible with non N2 purge FOUPs
• Nozzle up/down position detection function (sensors)
• Nozzle pressure adjustment function
• Exchangeable nozzles heads to fit individual port design
• Purge clean N2 gas
• Filters installed just before the nozzles prevents particles from entering the FOUP
• Adhesion FOUP grommet
• N2 gas flow control by MFC and monitoring by flow meters
• Compliant with SEMI, CE and FAB requirements (S2, S8, S28, E1.9, E15.1, E47.1, E57, E62, E63, E64, E84(optional), E110)