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Available Load Ports:
- N2 Purge Load Ports
- 200/300mm AutoSwitch Load Port
- 300mm SELOP-7 / SELOP-8 Load Port
- Multi Carrier Load Port
Compatible with Wafer, Hoop Ring and FFC Cassettes
Features
- BOLTS Interface — Exchangeable with 300mm FOUP Load Ports
- Multi-Carrier compatible by carrier adapter use:
- 150mm / 200mm Wafer (SEMI Standard)
- 150mm / 200mm FFC (Tape Frame)
- 150mm / 200mm Hoop Ring
- Automatic Identification of all above mentioned carriers
- Universal Mapping Arm
- Ideal for Mid and Back-End Processes