Single Load Port, Multi-Carrier

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Available Load Ports:

Compatible with Wafer, Hoop Ring and FFC Cassettes

Common Model Robot


  • BOLTS Interface — Exchangeable with 300mm FOUP Load Ports
  • Multi-Carrier compatible by carrier adapter use:
    • 150mm / 200mm Wafer (SEMI Standard)
    • 150mm / 200mm FFC (Tape Frame)
    • 150mm / 200mm Hoop Ring
  • Automatic Identification of all above mentioned carriers
  • Universal Mapping Arm
  • Ideal for Mid and Back-End Processes