Sinfonia N2-EFEM

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Available EFEMs:

Sinfonia N2-EFEM — Next Generation Technology

Common Model Robot
  • Extremely low Oxygen Level, ~100 ppm, can be achieved and maintained with minimal N2 Gas Consumption
  • Automatically Controlled Differential Pressure (of 10 ±3.5 Pa gage)
  • Equivalent Footprint to conventional EFEMs — Easy Drop in Replacements
  • EFEM Environment Monitors and Analysis:
    • Dew Point, Differential Pressure, Oxygen Concentration, Temperature
    • Real Time Data Monitoring
  • Auto-Teaching Option Simplifies Tool Setup and Reduce Down Time
  • Safety and Certifications
    • Exchange of Environment
    • S2, S8, CE Compliance (in progress)