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Available EFEMs:
- integrated Front End Module
- Standard Front End Modules
- N2 Front End Modules
- Vacuum Platforms
Sinfonia N2-EFEM — Next Generation Technology
- Extremely low Oxygen Level, ~100 ppm, can be achieved and maintained with minimal N2 Gas Consumption
- Automatically Controlled Differential Pressure (of 10 ±3.5 Pa gage)
- Equivalent Footprint to conventional EFEMs — Easy Drop in Replacements
- EFEM Environment Monitors and Analysis:
- Dew Point, Differential Pressure, Oxygen Concentration, Temperature
- Real Time Data Monitoring
- Auto-Teaching Option Simplifies Tool Setup and Reduce Down Time
- Safety and Certifications
- Exchange of Environment
- S2, S8, CE Compliance (in progress)