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Available EFEMs:
- integrated Front End Module
- Standard Front End Modules
- N2 Front End Modules
- Vacuum Platforms
EFEMs for 200, 300 & 450mm Applications
- Wide variety of versions:
- 2, 3, 4 and 5 Load Port versions
- Superior Cleanliness (ISO Class 1)
- High Reliability with high Throughput at the same time
- Excellent Accuracy: Robot / Pre-Aligner: ±0.05mm
- Wide variety of options:
- 300mm, 200mm and bridge tool (200mm / 300mm) functionality
- Carrier (RFID) Reader
- Wafer ID Reader
- Pre-Aligner
- Human Machine Interface
- Ionizer
- EFEM Controller