2-Link Atmospheric

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Available Robot Models:

SR8220 / SR8230 Wafer Handler Series


Common Model Robot

Lightning Fast with Maximum Throughput

  • Precision High Speed Motion
  • Excellent Straight Line Accuracy
  • 50,000 Hours MTBF
  • Super High Rigidity
  • AC Servo Motors with Absolute Encoders
  • Mechanical Edge Grip or Vacuum End Effectors
  • Class 1 Cleanliness
  • Wide variety of configurations:
    • Single and Double arm
    • 300mm and 600mm Z-Stroke
  • One of the World's Fastest 300 mm Wafer Handling Robot Series. Ultra clean Edge Grip End Effector achieves Superior Fast and Reliable Wafer Handling.